การพัฒนาระบบการวิเคราะห์งานเสียของการผลิตวงจรรวม / ศูลิน ศรีสุชาติ = Development of failure analysis system for integrated circuit manufacturing / Soolin Srisuchati
The objective of this study is to develop the failure analysis system for the integrated circuit manufacturing. The methodologies have started from collecting the knowledge of IC failure analysis, classifying group of knowledge for system database, creating the failure analysis system for integrated circuit manufacturing and verifying system accuracy by comparing with passed analysis result. The failure analysis system for integrated circuit manufacturing was developed by programming of PHP language and MS Access. The failure analysis system for integrated circuit manufacturing was developed for analysis 3 kinds of failure characteristics open circuit, short circuit and leak circuit. The system comprises 53 corrective failure modes and 6 preventive failure modes. The knowledge that was used in this system must be compiled to the relationship between 1) failure analysis flow 2) Detail description and 3) Failure mode. The result after implementation the system, technicians are satisfied the system. The systemcan provide suggestion instead of engineers anytime. It will suggest from non-destructive method to keep failure condition. If it can not find failure mode it will suggest to use destructive method in order to find the correct failure mode. Verification of system was performed by comparing between analysis result from the system and analysis result from 253 passed failure analysis reports. The comparative results are the same in all issues.
