Advanced Scanning Electron Microscopy and X-Ray Microanalysis [electronic resource] / by Dale E. Newbury, David C. Joy, Patrick Echlin, Charles E. Fiori, Joseph I. Goldstein
Imprint
Boston, MA : Springer US : Imprint: Springer, 1986
This book has its origins in the intensive short courses on scanning elecยญ tron microscopy and x-ray microanalysis which have been taught annually at Lehigh University since 1972. In order to provide a textbook containing the materials presented in the original course, the lecturers collaborated to write the book Practical Scanning Electron Microscopy (PSEM), which was published by Plenum Press in 1975. The course conยญ tinued to evolve and expand in the ensuing years, until the volume of material to be covered necessitated the development of separate introยญ ductory and advanced courses. In 1981 the lecturers undertook the project of rewriting the original textbook, producing the volume Scanยญ ning Electron Microscopy and X-Ray Microanalysis (SEMXM). This volยญ ume contained substantial expansions of the treatment of such basic material as electron optics, image formation, energy-dispersive x-ray spectrometry, and qualitative and quantitative analysis. At the same time, a number of chapters, which had been included in the PSEM volยญ ume, including those on magnetic contrast and electron channeling conยญ trast, had to be dropped for reasons of space. Moreover, these topics had naturally evolved into the basis of the advanced course. In addition, the evolution of the SEM and microanalysis fields had resulted in the develยญ opment of new topics, such as digital image processing, which by their nature became topics in the advanced course
CONTENT
1. Modeling Electron Beam-Specimen Interactions -- 2. SEM Microcharacterization of Semiconductors -- 3. Electron Channeling Contrast in the SEM -- 4. Magnetic Contrast in the SEM -- 5. Computer-Aided Imaging and Interpretation -- 6. Alternative Microanalytical Techniques -- 7. Specimen Coating -- 8. Advances in Specimen Preparation for Biological SEM -- 9. Cryomicroscopy -- References
