Author | Kersch, Alfred. author |
---|---|
Title | Transport Simulation in Microelectronics [electronic resource] / by Alfred Kersch, William J. Morokoff |
Imprint | Basel : Birkhรคuser Basel, 1995 |
Connect to | http://dx.doi.org/10.1007/978-3-0348-9080-9 |
Descript | 240 p. online resource |
Content -- 1 The Boltzmann Equation -- 1.1 The Liouville Equation -- 1.2 Rarefied Gases -- 1.3 Radiation Transport -- 1.4 Electron Transport -- 1.5 Summary -- 2 Modeling of Gas Flow -- 2.1 Typical Reactors -- 2.2 Hydrodynamic Equations -- 2.3 Near Hydrodynamic Flows -- 2.4 Transition Regime Flows -- 2.5 Free Molecular Flow -- 3 Numerical Methods for Rarefied Gas Dynamics -- 3.1 Direct Simulation Monte Carlo -- 3.2 Computing Results -- 3.3 Extensions -- 3.4 Simplified Flows -- 4 Gas Transport Simulations -- 4.1 Near Hydrodynamic Effects -- 4.2 UHV-CVD Reactor -- 4.3 Sputtering Reactors -- 5 Modeling of Radiative Heat Transfer -- 5.1 Rapid Thermal Processing -- 5.2 Semi-transparent Materials -- 5.3 Optical Properties of Surfaces -- 5.4 Solution of the Integral Equation -- 5.5 The Rendering Equation -- 6 Monte Carlo for Radiation Transport -- 6.1 Monte Carlo Solution Procedure -- 6.2 Quasi-Monte Carlo Methods -- 6.3 Coupling Radiation and Gas Transport -- 7 Radiation Transport Simulations -- 7.1 Case Study of an RTP Reactor -- 7.2 Scalar Control RTCVD-reactor -- 7.3 Multi-variable Control RTCVD-reactor -- 8 Modeling of Charge Transport -- 8.1 Numerical Methods for Linear Transport -- 8.2 Further Comparisons -- A Monte Carlo Methods -- References