Author | Kozicki, M. author |
---|---|
Title | Cleanrooms [electronic resource] : Facilities and Practices / by M. Kozicki, S. Hoenig, P. Robinson |
Imprint | Dordrecht : Springer Netherlands, 1991 |
Connect to | http://dx.doi.org/10.1007/978-94-011-7950-8 |
Descript | X, 374 p. online resource |
1. Introduction to Cleanroom Technology -- The Need for Cleanrooms -- An Overview of Semiconductor Technology -- Other Cleanroom Applications -- The Impact of Cleanroom Technology -- 2. Microcontamination -- Types of Contamination -- Sources of Contamination -- Effects of Contamination -- Summary -- 3. Controlled Environment Concepts -- Performance Considerations -- Performance Standards -- Parameter Measurement -- Summary -- 4. Creating Clean Areas -- Construction Materials and Techniques -- Air Filtration -- Airflow -- Equipment and Material Decontamination -- Bringing Items into the Cleanroom -- Summary -- 5. Cleanroom Layout -- Mixed Flow Rooms -- Local Unidirectional Flow -- Modular Cleanrooms -- Tunnel Cleanrooms -- Total Vertical Laminar Flow -- Horizontal Laminar Flow -- Process Equipment -- Designing for Cleanroom Class -- Summary -- 6. Preconditioning, Control, and Static -- Air Handling Systems -- Fans and Air Control -- Static -- Summary -- 7. Site and Structural Considerations -- Vibration -- Site Selection -- Structure -- Internal Vibration Engineering -- Summary -- 8. Cleanrooms, Codes, and Legislation -- Principal Codes -- Fire Protection -- Legislation -- Summary -- 9. Ultrapure Water -- The Need for Ultrapure Water -- Constituents of Raw Water -- Purification Techniques -- RO/DI System Configurations -- Operational Considerations -- Summary -- 10. Production Materials -- Gases -- Wet Chemicals -- Handling Other Materials -- Summary -- 11. Personnel and Contamination -- Apparel -- Use of Apparel -- Work Practices -- Summary -- 12. Safety Issues -- Properties of Hazardous Production Materials -- Cleanroom Safety Practices -- Safety Equipment -- Handling Hazardous Production Materials -- Summary -- 13. The Future of Controlled Environments -- Advanced Cleanroom Concepts -- Enclosed Transfer Systems -- Robotics and Automation -- In-situ Processing -- EpilogโThe Cleanroom as a System -- Appendix 1 Federal Standard 209D -- Appendix 2 Simplified Cleanroom Certification Procedure -- Appendix 3 Program and Sample Output