AuthorLiang, Hong, 1961-
TitleTribology in chemical-mechanical planarization [electronic resource] / Hong Liang, David Craven
Imprint Boca Raton, Fla. : Taylor & Francis, 2005
Connect tohttp://marc.crcnetbase.com/isbn/9781420028393
Descript 185 p. : ill

Tribology Grinding and polishing Chemical mechanical planarization Electronic books.