Author | Liang, Hong, 1961- |
---|---|
Title | Tribology in chemical-mechanical planarization [electronic resource] / Hong Liang, David Craven |
Imprint | Boca Raton, Fla. : Taylor & Francis, 2005 |
Connect to | http://marc.crcnetbase.com/isbn/9781420028393 |
Descript | 185 p. : ill |