Annual Member
| Author | Bowen, D. Keith (David Keith), 1940- |
|---|---|
| Title | X-ray metrology in semiconductor manufacturing [electronic resource] / D. Keith Bowen, Brian K. Tanner |
| Imprint | Boca Raton, FL. : CRC/Taylor & Francis, 2006 |
| Connect to | http://marc.crcnetbase.com/isbn/9781420005653 |
| Descript | 279 p. : ill |
Office of Academic Resources
Chulalongkorn University
254 Phayathai Road, Pathumwan, Bangkok 10330 Thailand
Library Service 0-2218-2929, 0-2218-2927
Administrative Division 0-2218-2903
Fax. 0-2215-3617
Email 