AuthorBowen, D. Keith (David Keith), 1940-
TitleX-ray metrology in semiconductor manufacturing [electronic resource] / D. Keith Bowen, Brian K. Tanner
Imprint Boca Raton, FL. : CRC/Taylor & Francis, 2006
Connect tohttp://marc.crcnetbase.com/isbn/9781420005653
Descript 279 p. : ill

Semiconductors -- Design and construction -- Quality control Integrated circuits -- Measurement Semiconductor wafers -- Inspection X-rays -- Diffraction Fluroscopy Electronic books.