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AuthorBowen, D. Keith (David Keith), 1940-
TitleX-ray metrology in semiconductor manufacturing [electronic resource] / D. Keith Bowen, Brian K. Tanner
Imprint Boca Raton, FL. : CRC/Taylor & Francis, 2006
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Descript 279 p. : ill

Semiconductors -- Design and construction -- Quality control Integrated circuits -- Measurement Semiconductor wafers -- Inspection X-rays -- Diffraction Fluroscopy Electronic books.


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