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หน้าแรก Library Catalog (OPAC)

AuthorBowen, D. Keith (David Keith), 1940-
TitleX-ray metrology in semiconductor manufacturing [electronic resource] / D. Keith Bowen, Brian K. Tanner
Imprint Boca Raton, FL. : CRC/Taylor & Francis, 2006
Connect tohttp://marc.crcnetbase.com/isbn/9781420005653
Descript 279 p. : ill

SUBJECT

  1. Semiconductors -- Design and construction -- Quality control
  2. Integrated circuits -- Measurement
  3. Semiconductor wafers -- Inspection
  4. X-rays -- Diffraction
  5. Fluroscopy
  6. Electronic books.

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