TitleThe MEMS handbook [electronic resource] / edited by Mohamed Gad-el-Hak
Imprint Boca Raton, FL : CRC Press, c2002
Connect tohttp://marc.crcnetbase.com/isbn/9781420050905
Descript 1368 p. : ill

Mechanical engineering -- Handbooks manuals etc Microelectromechanical systems -- Handbooks manuals etc Electronic books.