TitleThe MEMS handbook [electronic resource] / edited by Mohamed Gad-el-Hak
Imprint Boca Raton, FL : CRC Press, c2002
Connect tohttp://marc.crcnetbase.com/isbn/9781420050905
Descript 1368 p. : ill

SUBJECT

  1. Mechanical engineering -- Handbooks
  2. manuals
  3. etc
  4. Microelectromechanical systems -- Handbooks
  5. manuals
  6. etc
  7. Electronic books.