Annual Member
| Title | Run-to-run control in semiconductor manufacturing [electronic resource] / edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz |
|---|---|
| Imprint | Boca Raton : CRC Press, 2001 |
| Connect to | http://marc.crcnetbase.com/isbn/9781420040661 |
| Descript | 348 p. : ill |
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