TitleRun-to-run control in semiconductor manufacturing [electronic resource] / edited by James Moyne, Enrique del Castillo, Arnon Max Hurwitz
Imprint Boca Raton : CRC Press, 2001
Connect tohttp://marc.crcnetbase.com/isbn/9781420040661
Descript 348 p. : ill

Semiconductors -- Design and construction Semiconductor industry -- Production control Electronic packaging Production management Electronic books.