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AuthorSherer, J. Michael, 1958-
TitleSemiconductor industry [electronic resource] : wafer fab exhaust management / J. Michael Sherer
Imprint Boca Raton, FL : CRC/Taylor & Francis, 2005
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Descript 194 p

Semiconductor wafers -- Design and construction Semiconductor industry -- Environmental aspects Volatile organic compounds -- Environmental aspects Air -- Purification -- Technological innovations Electronic books.


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