Annual Member
| Author | Sherer, J. Michael, 1958- |
|---|---|
| Title | Semiconductor industry [electronic resource] : wafer fab exhaust management / J. Michael Sherer |
| Imprint | Boca Raton, FL : CRC/Taylor & Francis, 2005 |
| Connect to | http://marc.crcnetbase.com/isbn/9781420027198 |
| Descript | 194 p |
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