TitleScientific wet process technology for innovative LSI/FPD manufacturing [electronic resource] / edited by Tadahiro Ohmi
Imprint Boca Raton, FL : CRC/Taylor & Francis, 2006
Connect tohttp://marc.crcnetbase.com/isbn/9781420026863
Descript 386 p. : ill

SUBJECT

  1. Semiconductors -- Design and construction
  2. Semiconductors -- Cleaning
  3. Integrated circuits -- Design and construction
  4. Electronic books.