AuthorLiu, Ai-Qun
TitlePhotonic MEMS devices [electronic resource] : design, fabrication and control / Ai-Qun Liu ... [et al.]
Imprint Boca Raton, Fla. : CRC Press, 2009
Connect tohttp://marc.crcnetbase.com/isbn/9781420045710
Descript 483 p. : ill

Microelectromechanical systems Photonics Electronic books.