Author | Liu, Ai-Qun |
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Title | Photonic MEMS devices [electronic resource] : design, fabrication and control / Ai-Qun Liu ... [et al.] |
Imprint | Boca Raton, Fla. : CRC Press, 2009 |
Connect to | http://marc.crcnetbase.com/isbn/9781420045710 |
Descript | 483 p. : ill |