| Author | Liu, Ai-Qun |
|---|---|
| Title | Photonic MEMS devices [electronic resource] : design, fabrication and control / Ai-Qun Liu ... [et al.] |
| Imprint | Boca Raton, Fla. : CRC Press, 2009 |
| Connect to | http://marc.crcnetbase.com/isbn/9781420045710 |
| Descript | 483 p. : ill |