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| Title | Optical inspection of microsystems [electronic resource] / edited by Wolfgang Osten |
|---|---|
| Imprint | Boca Raton, FL : CRC/Taylor & Francis, c2007 |
| Connect to | http://marc.crcnetbase.com/isbn/9781420019162 |
| Descript | 503 p., [8] p. of plates : ill. (some col.) |
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