TitleOptical inspection of microsystems [electronic resource] / edited by Wolfgang Osten
Imprint Boca Raton, FL : CRC/Taylor & Francis, c2007
Connect tohttp://marc.crcnetbase.com/isbn/9781420019162
Descript 503 p., [8] p. of plates : ill. (some col.)

Quality control -- Optical methods Optical detectors -- Industrial applications Microelectronics Electronic books.