AuthorPaik, Ungyu
TitleNanoparticle engineering for chemical-mechanical planarization [electronic resource] : fabrication of next-generation nanodevices / authors, Ungyu Paik, Jea-Gun Park
Imprint Boca Raton : Taylor & Francis, 2009
Connect tohttp://marc.crcnetbase.com/isbn/9781420059137
Descript xiii, 191 p., [14] p. of plates : ill. (some col.)

Chemical mechanical planarization Nanoparticles Nanoelectronics Electronic books.