Annual Member
| Author | Paik, Ungyu |
|---|---|
| Title | Nanoparticle engineering for chemical-mechanical planarization [electronic resource] : fabrication of next-generation nanodevices / authors, Ungyu Paik, Jea-Gun Park |
| Imprint | Boca Raton : Taylor & Francis, 2009 |
| Connect to | http://marc.crcnetbase.com/isbn/9781420059137 |
| Descript | xiii, 191 p., [14] p. of plates : ill. (some col.) |
