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AuthorPaik, Ungyu
TitleNanoparticle engineering for chemical-mechanical planarization [electronic resource] : fabrication of next-generation nanodevices / authors, Ungyu Paik, Jea-Gun Park
Imprint Boca Raton : Taylor & Francis, 2009
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Descript xiii, 191 p., [14] p. of plates : ill. (some col.)

Chemical mechanical planarization Nanoparticles Nanoelectronics Electronic books.


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