TitleMicrolithography [electronic resource] : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith
Imprint Boca Raton : CRC Press, c2007
Edition 2nd ed
Connect tohttp://marc.crcnetbase.com/isbn/9781420051537
Descript 848 p. : ill

SUBJECT

  1. Microlithography -- Industrial applications
  2. Integrated circuits -- Masks
  3. Metal oxide semiconductors
  4. Complementary -- Design and construction
  5. Manufacturing processes
  6. Electronic books.