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TitleMicrolithography [electronic resource] : science and technology
Author edited by Kazuaki Suzuki, Bruce W. Smith
Imprint Boca Raton : CRC Press, c2007
Edition 2nd ed
Connect tohttp://marc.crcnetbase.com/isbn/9781420051537
Descript 848 p. : ill

Microlithography -- Industrial applications Integrated circuits -- Masks Metal oxide semiconductors Complementary -- Design and construction Manufacturing processes Electronic books.



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