TitleMicrolithography [electronic resource] : science and technology / edited by Kazuaki Suzuki, Bruce W. Smith
Imprint Boca Raton : CRC Press, c2007
Edition 2nd ed
Connect tohttp://marc.crcnetbase.com/isbn/9781420051537
Descript 848 p. : ill

Microlithography -- Industrial applications Integrated circuits -- Masks Metal oxide semiconductors Complementary -- Design and construction Manufacturing processes Electronic books.