TitleMEMS [electronic resource] : introduction and fundamentals / edited by Mohamed Gad-El-Hak
Imprint Boca Raton : CRC/Taylor & Francis, 2006
Edition 2nd ed
Connect tohttp://marc.crcnetbase.com/isbn/9781420036572
Descript 488 p. : ill

Microelectromechanical systems Microelectronics Nanotechnology Electronic books.