TitleMEMS [electronic resource] : design and fabrication / edited by Mohamed Gad-el-Hak
Imprint Boca Raton, FL : CRC/Taylor & Francis, 2006
Edition 2nd ed
Connect tohttp://marc.crcnetbase.com/isbn/9781420036565
Descript 664 p. : ill

Microelectromechanical systems -- Design and construction Microfabrication Electronic books.