TitleMicrofabrication and nanomanufacturing [electronic resource] / edited by Mark J. Jackson
Imprint Boca Raton, FL : CRC/Taylor & Francis, 2006
Connect tohttp://marc.crcnetbase.com/isbn/9781420028270
Descript 401 p. : ill

SUBJECT

  1. Microelectronics
  2. Integrated circuits -- Design and construction
  3. Microelectromechanical systems -- Design and construction
  4. Electronic books.