Microfabrication and nanomanufacturing [electronic resource] / edited by Mark J. Jackson

Title	Microfabrication and nanomanufacturing [electronic resource] / edited by Mark J. Jackson
Imprint	Boca Raton, FL : CRC/Taylor & Francis, 2006
Connect to	http://marc.crcnetbase.com/isbn/9781420028270
Descript	401 p. : ill

Microelectronics Integrated circuits -- Design and construction Microelectromechanical systems -- Design and construction Electronic books.

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