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AuthorAllen, James J
TitleMicro electro mechanical system design [electronic resource] / James J. Allen
Imprint Boca Raton, FL. : Taylor & Francis, 2005
Connect tohttp://marc.crcnetbase.com/isbn/9781420027754
Descript 465 p. : ill

Microelectromechanical systems -- Design and construction Engineering design Electronic books.



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