AuthorAllen, James J
TitleMicro electro mechanical system design [electronic resource] / James J. Allen
Imprint Boca Raton, FL. : Taylor & Francis, 2005
Connect tohttp://marc.crcnetbase.com/isbn/9781420027754
Descript 465 p. : ill

SUBJECT

  1. Microelectromechanical systems -- Design and construction
  2. Engineering design
  3. Electronic books.