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AuthorPelesko, John A
TitleModeling MEMS and NEMS [electronic resource] / John A. Pelesko and David H. Bernstein
Imprint Boca Raton, FL : Chapman & Hall/CRC, 2003
Connect tohttp://marc.crcnetbase.com/isbn/9781420035292
Descript xxiii, 357 p. : ill

Microelectromechanical systems -- Mathematical models Electronic books.



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