TitleMicro-optomechatronics [electronic resource] / Hiroshi Hosaka ... [et al.]
Imprint New York : Marcel Dekker, c2005
Connect tohttp://marc.crcnetbase.com/isbn/9780203997420
Descript viii, 306 p. : ill

SUBJECT

  1. Microelectromechanical systems
  2. Mechatronics
  3. Nanotechnology
  4. Optoelectronic devices
  5. Electronic books.