Annual Member
| Title | Handbook of semiconductor manufacturing technology [electronic resource] / edited by Robert Doering, Yoshio Nishi |
|---|---|
| Imprint | Boca Raton : CRC Press, c2008 |
| Edition | 2nd ed |
| Connect to | http://marc.crcnetbase.com/isbn/9781420017663 |
| Descript | 1720 p. : ill |
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