AuthorSenturia, Stephen D.
TitleMicrosystem Design [electronic resource] / by Stephen D. Senturia
Imprint Boston, MA : Kluwer Academic Publishers, 2002
Connect tohttp://dx.doi.org/10.1007/b117574
Descript-

SUBJECT

  1. Engineering
  2. Optical and Electronic Materials
  3. Electronic and Computer Engineering
  4. Mechanics