AuthorChapman, Brian N
TitleGlow discharge processes : sputtering and plasma etching / Brian Chapman
Imprint New York : Wiley, 1980
Descript xv, 406 p. : ill

SUBJECT

  1. Sputtering (Physics)
  2. Glow discharges
  3. Plasma etching

LOCATIONCALL#STATUS
Engineering LibraryQC702.7.P6 C4 CHECK SHELVES