| Title | Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.] |
|---|---|
| Imprint | New York : Academic Press, 1980 |
| Descript | xi, 362 p. : ill |
| LOCATION | CALL# | STATUS |
|---|---|---|
| Engineering Library : Stack | TK7874 E48 | CHECK SHELVES |