TitleElectron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
Imprint New York : Academic Press, 1980
Descript xi, 362 p. : ill

SUBJECT

  1. Microelectronics
  2. Lithography
  3. Electron beam

LOCATIONCALL#STATUS
Engineering Library : StackTK7874 E48 CHECK SHELVES