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TitleElectron-beam technology in microelectronic fabrication
Author edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.]
Imprint New York : Academic Press, 1980
Descript xi, 362 p. : ill

Microelectronics Lithography Electron beam

Engineering Library : StackTK7874 E48CHECK SHELVES

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