Title | Electron-beam technology in microelectronic fabrication / edited by George R. Brewer ; contributors, J. P. Ballantyne ... [et al.] |
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Imprint | New York : Academic Press, 1980 |
Descript | xi, 362 p. : ill |
LOCATION | CALL# | STATUS |
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Engineering Library : Stack | TK7874 E48 | CHECK SHELVES |