Annual Member
| Title | Introduction to microlithography : theory, materials, and processing / [edited by] L.F. Thompson, C.G. Willson, M.J. Bowden |
|---|---|
| Imprint | Washington, D.C. : American Chemical Society, 1983 |
| Descript | ix, 363 p. : ill., charts ; 24 cm |
| LOCATION | CALL# | STATUS |
|---|---|---|
| Central Library (4th Floor) | 686.2315 I61 | CHECK SHELVES |
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