TitleVLSI electronics microstructure science. materials and process characterization. vol.6 / ed. by N.G. Einspruch [and] G.B. Larrabe
Imprint New York : Academic Press, 1983
Descript xii, 601 p. : ill., charts, tables

SUBJECT

  1. Integrated circuits -- Very large scale intergration

LOCATIONCALL#STATUS
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