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TitleMicro and Nano Fabrication Technology [electronic resource] / edited by Jiwang Yan
ImprintSingapore : Springer Singapore : Imprint: Springer, 2019
Connect tohttps://doi.org/10.1007/978-981-10-6588-0
Descript XII, 958 p. online resource

SUMMARY

This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/mat erial science, optics, physics, chemistry, and more


CONTENT

Material Physics -- Pattern design and transformation: Lithography -- Process simulation -- Metalization -- Deposition -- Wet etching -- Dry etching -- Assembly and packaging -- Laser micro and nanofabrication -- Nanomachining


Engineering Nanotechnology Medicine Biomedical engineering Nanotechnology and Microengineering. http://scigraph.springernature.com/things/product-market-codes/T18000 Nanotechnology. http://scigraph.springernature.com/things/product-market-codes/Z14000 Medicine/Public Health general. http://scigraph.springernature.com/things/product-market-codes/H00007 Biomedical Engineering and Bioengineering. http://scigraph.springernature.com/things/product-market-codes/T2700X



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